Field emission gun scanning electron microscope

Sigma 300 VP (ZEISS)

ELCHE Campus

Field emission gun scanning electron microscope (FESEM) that allows high-quality image capture combined with advanced elemental analysis.

Key features:

• Schottky-type hot cathode electron gun

• Working voltage between 0.02 and 30 kV

• Resolution of 1.0 nm at 15 kV and 1.6 nm at 1 kV

• Working modes:
  High vacuum (HV)
  Variable pressure or low vacuum (VP, between 10 and 133 Pa)

• Detectores:
  Everhart-Thornley Secondary Electrons (SE)
  Secondary Electrons (InLens)
  Variable Pressure Secondary Electrons (VPSE)
  Back Scattered Electrons (BSE)
  Energy Dispersive X-ray (EDX)
  Transmitted Electrons (STEM)

ELCHE Campus

TORREPINET Building
(GIS Code: E08P0008)

• Rodríguez Cañas, Enrique
• +34 965 22 2237

The equipment has been acquired thanks to a project co-financed by the European Union through the Operational Program of the European Regional Development Fund (ERDF) of the Valencian Community 2014-2020 (PROJECT: IDIFEDER2020/022).

Both this electron microscope and IDiBE’s laser scanning confocal microscope can share the same type of sample holder and use the same software, so that correlative light-electron microscopy (CLEM) can be easily performed by superimposing and merging the information obtained by both techniques in the same area of the sample.